Reversible Actuation Of Folded Multilayered Graphene By Electrostatic Forces For Nano-Gripper Application

2017 IEEE 17TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)(2017)

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摘要
We studied bending of multilayered graphene into 3D structure. In this paper, we proposed a nanogripper folded by multilayered graphene as one of the 3D device. The nanogripper is actuated by electro static forces to open and close. The multilayered graphene was fabricated by focused ion beam (FIB) to form nano-gripper design. Reversible action is realized by controlled two different electrodes. In the experimental section, the relationship of actuation distance and applied voltage was evaluated for folded multilayered graphene.
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关键词
reversible actuation,folded multilayered graphene,actuation distance,electrostatic force actuation,nanogripper,applied voltage,focused ion beam fabrication,bending,C
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