Investigation of the structure and optoelectrical properties of Ti/Au/TiO2 core-shell nanodot arrays

Core-shell nanodot arrays of Ti/Au/TiO ₂ have been obtained on EBL patterned substrates by RF sputtering of Ti in a controlled ambient of Ar/O ₂ plasma. X-ray diffraction analyses showed that the TiO ₂ films crystallinity and the lattice strain is strongly affected by the O2 content. Photoluminescence emission bands at 2.97 eV and 2.59 eV evidenced the presence of point defects related to oxygen deficiency. MOS capacitors based on the Ti/Au/TiO ₂ arrays were fabricated and the effect of TiO ₂ /Au interface in tailoring the electronic band structure was analyzed in relationship with numerical models.