A Wideband, Low-Noise Accelerometer for Sonar Wave Detection
IEEE Sensors Journal(2018)
摘要
This paper presents the development of a highperformance micromachined capacitive accelerometer for detection of sonar waves. The device is intended to replace existing hydrophones in towed array sonar systems, and thus, needs to meet stringent performance requirements on noise, bandwidth, and dynamic range, among others. The in-plane, single-axis accelerometer is designed based on a mode-tuning s...
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关键词
Accelerometers,Bandwidth,Sensors,Resonant frequency,Sonar equipment,Sonar detection
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