Surface modifications of crystal-ion-sliced LiNbO3 thin films by low energy ion irradiations
Applied Surface Science(2018)
Abstract
•Single crystalline 128°Y-cut LiNbO3 thin films are fabricated on Si substrates by crystal-ion-slicing technique using BCB wafer bonding.•Low energy Ar+ irradiation is adopted to implement surface polishing on the submicron single crystalline LN thin films.•Surface damage layer produced by CIS process is removed by Ar+ irradiation.•A smooth surface of LN thin films is finally obtained by Ar+ irradiation.
MoreTranslated text
Key words
128°Y-cut LiNbO3,Single crystalline thin films,Crystal ion slicing,BCB bonding,Ar+ irradiation
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined