High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators

Jie Zou,Chih-Ming Lin,Gongbin Tang,Albert P. Pisano

IEEE Electron Device Letters（2017）

Cited 59|Views2

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Abstract

Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90° are proposed to boost the quality factor (Q) of Lamb wave resonators (LWRs) thanks to the elimination of the anchor loss. Finite-element method simulation shows that the butterfly-shaped plate can efficiently reduce mechanical energy leakage via the supporting anchors and accordingly enhance the mechanical Q...

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Key words

Aluminum nitride,III-V semiconductor materials,Resonators,Finite element analysis,Mechanical energy,Vibrations,Q-factor

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