Isotherm analysis of the solution-phase uptake of chlorotrimethyl silane on a photosensitive glass

•Coverage of silane on the surface is patchy or island-like because the clean glass has a patchy surface chemistry.•The uptake of silane follows a two-step reaction model with physisorption followed by first-order chemical reaction.•A Freundlich isotherm model fits the physisorption step better than a Langmuir isotherm.