Dose-Rate Effects on the Total-Ionizing-Dose Response of Piezoresistive Micromachined Cantilevers

Charles N. Arutt,Wenjun Liao,Huiqi Gong,Pranoy Deb Shuvra,Ji-Tzuoh Lin,Michael L. Alles,Bruce W. Alphenaar,Jim L. Davidson,Kevin M. Walsh,Shamus McNamara,En Xia Zhang,Andrew L. Sternberg,Daniel M. Fleetwood,Robert A. Reed,Ronald D. Schrimpf

IEEE Transactions on Nuclear Science（2018）

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摘要

Total-ionizing-dose-induced resonance frequency shifts in piezoresistive micromachined cantilevers are experimentally shown to be dose-rate dependent. Devices were irradiated to 1 Mrad(SiO2) at rates from 5.4 to 30.3 krad(SiO2)/min, with lower rate exposures producing up to four-times more negative frequency shifts than higher rate exposures. Devices that were hydrogenated in a steam bath for 1 h ...

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关键词

Resonant frequency,Radiation effects,Hydrogen,Piezoresistance,Structural beams,Micromechanical devices,X-rays

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