A fluid-coupled transmitting CMUT operated in collapse mode: Semi-analytic modeling and experiments

Martin Pekař, Stephan H.M. van Nispen,Rob H.B. Fey,Sergei Shulepov,Nenad Mihajlović,Henk Nijmeijer

Sensors and Actuators A: Physical（2017）

Cited 6|Views5

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Abstract

•A semi-analytic model of fluid-loaded, transmitting, collapse-mode CMUT is developed.•The model is validated by experimental measurements of a fabricated CMUT prototype.•Static response incl. hysteresis behavior is predicted with high accuracy.•Dynamic response behavior incl. frequency-tunability is predicted with satisfactory accuracy.•The model allows fast parameter analysis and is a powerful tool for CMUT (pre-)design.

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Key words

Capacitive micromachined ultrasonic transducer,Semi-analytic model,Collapse-mode,Simulations,Experiments

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