Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives
Materials & Design(2018)
Abstract
Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratory-based characterisation of nanomaterials has been the key enabler in the growth of nanotechnology and nano-enabled products. Due to the small size involved, dimensional measurements has dominated such characterisation underpinned by a tremendous development in stand-alone electron/ion microscopes and scanning probe microscopes.
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Key words
Nanometrology,Nanoindentation, AFM,Bio,Microscopy,Nanoscopy
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