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Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

Haoran Wang,Xiaoyang Zhang,Daihua Zhang,Liang Zhou,Huikai Xie

2017 International Conference on Optical MEMS and Nanophotonics (OMN)（2017）

Cited 2|Views7
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Abstract
An electrothermal bimorph based MEMS mirror with large scan range, high fill factor and high resonant frequency is presented. A reliability issue due to burn-out of a bimorph thermal actuator is also studied and modeled.
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Key words
MEMS,Micromirror,bimorph,electrothermal actuation,reliability
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