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Batch production of silicon fiber-top cantilever devices

J.H. Rector,Steven V. Beekmans,M.J. Slaman, R. Verdoold,D. Iannuzzi

2017 International Conference on Optical MEMS and Nanophotonics (OMN)（2017）

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Abstract
We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. Here, the stepwise fabrication procedure is described and the performance of the final device is demonstrated.
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Key words
batch production,fiber-top device,cantilever,MEMS,Photolithography
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