UHV AFM based colloidal probe studies of adhesive properties of VAlN hard coatings

M. Wiesing,T. de los Arcos,Guido Grundmeier

Applied Surface Science（2018）

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摘要

•The adhesive properties of VAlN (oxidized/non-oxidized) were investigated in UHV.•Oxidation formed a highly polarizable oxynitride terminated with oxidic V(+5) ions.•The adhesion to polystyrene due to van der Waals (vdW) forces is thus unaffected.•vdW forces significantly contribute to adhesion even in the presence of coordinative and electrostatic forces.

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关键词

VAlN,Adhesion,Oxidation,HPPMS,Hard coating,Colloidal probe

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