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Two-photon absorption lithography for nanofabrication of 3D X-Ray compound refractive lenses

Ksenia A. Abrashitova,A. K. Petrov,V. O. Bessonov,N. G. Kokareva,K. R. Safronov,A. A. Barannikov,P. A. Ershov,N. B. Klimova,I. I. Lyatun,Vyacheslav Yunkin,Maxim Polikarpov,I. Snigireva,Andrey A. Fedyanin,A. Snigirev

Frontiers in Optics（2017）

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Abstract
The present work proves that X-Ray compound refractive nano-lens can be produced through two-photon polymerization lithography. It was tested successfully at the X-ray microfocus laboratory source and a focal spot of 5 µm was measured.
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Key words
refractive lenses,nanofabrication,two-photon,x-ray
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