Gas temperature estimation of microcrystalline-slicon-film-growth process under high pressure in VHF PECVDYasushi Sobajima, Daisuke Kitano, Haruka Kubota, Kouhei Kodama,Akihisa Matsuda,Hiroaki OkamotoThe Japan Society of Applied Physics（2017）引用 23|浏览8暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
