Photolithographic patterning of nanocrystalline europium-titanate Eu2Ti2O7 thin films on silicon substrates

Jan Mrázek,Jan Boháček,Soňa Vytykáčová,Jiří Buršík,Viktor Puchý,Džunda Robert,Ivan Kasik

Materials Letters（2017）

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摘要

•Nanocrystalline Eu2Ti2O7 thin films with tailored properties were prepared.•Structural properties of prepared films were evaluated.•Sophisticated patterns were successfully written by photolithography.•Presented approach is suitable for a construction of integrated spintronic devices.

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关键词

Thin films,Rare earth compounds,Photolithography,Magnetic materials

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