Novel Electrically Tunable Microwave Solenoid Inductor and Compact Phase Shifter Utilizing Permaloy and PZT Thin Films
IEEE Transactions on Microwave Theory and Techniques（2017）
Abstract
A Permalloy (Py) thin film enabled tunable 3-D solenoid inductor is designed and fabricated. The special configuration of magnetic core is discussed and by selectively patterning Py thin film, the proposed tunable inductor can work at frequency up to several GHz range. The inductance of the solenoid inductor can be electrically tuned by dc current and the tunability is above 10%. Utilizing the imp...
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Key words
Solenoids,Inductors,Magnetic cores,Inductance,Gold,Phase shifters,Magnetic resonance
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