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White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation

Yunfei Zhou,Liyun Zhong,Hongzhi Cai,Jindong Tian,Dong Li,Xiaoxu Lu

IEEE Photonics Journal（2017）

Cited 9|Views1
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Abstract
Based on generalized cross-correlation time delay estimation (GCTDE), a new white light scanning interferometry (WLSI) method is proposed, in which the profile information usually achieved with the zero optical path difference (ZOPD) position is replaced with the relative displacement of interference signal between different pixels. Because all spectral information of interference signal (envelope...
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Key words
Interference,Filtering,Fourier transforms,Optical interferometry,Semiconductor device measurement,Shape
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