From sensors to intelligence
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)(2017)
Abstract
"Smart" cars, houses, offices, cities, etc. require increasingly large variety of sensors and associated electronics. This paper describes T SMC's activities in motion, pressure, optical and bio sensors that we hope will help transform "smart everything" into an "intelligent world" we will live in.
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Key words
MEMS,CMOS-MEMS,WLCSP,BIOMOSFET,CIS,SPAD
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