Electrical Conductivity Enhancement Of 1d Glassy Carbon Nanostructure Using Rapid Thermal Annealing

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)(2017)

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摘要
Rapid thermal annealing (RTA) process enabling significant enhancement of electrical conductivity (up to 2.3 times greater than currently reported conductivity values) of 1D glassy carbon nanostructures fabricated using carbon-MEMS was developed. After the RTA process, the carbon/oxygen and G-/D-band ratios that are strongly correlated to the electrical conductivity were changed depending on the pyrolysis temperature. The architecture of a suspended carbon nanowire also plays strong role on RTA-based conductivity enhancement by up to 14 % compared to carbon nanowire built on the substrate. In addition, electrochemical reactivity can be enhanced via RTA enabling better redox current collection.
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关键词
Glassy carbon nanostructures, rapid thermal annealing process, graphitization, electrical conductivity, carbon-MEMS
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