A Novel Inertial Microswitch With Synchronous Follow-Up Compliant Electrodes For Extending Output Switch-On Pulse Width

This paper reports a novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width. The flexible movable electrode and stationary electrode are proposed to keep a continuous duration contact by double-stair and spring-shape structures, which can not only extend the output switch-on pulse width but also reduce the impact bounces. Then the inertial microswitch has been fabricated using surface micromachining and multilayer electroplating technology. The comparison testing results show that there is no contact bouncing behavior can be observed under similar to 466g half sine-wave shock acceleration and the test output switch-on pulse width can reach 390 mu s, which is longer than that in the traditional design.