Fabrication and Evaluation of Piezoelectric Film by Compact Sputtering SystemIsao Kimura,Hiroki Kobayashi, Tatsuro Tsuyuki,Takehito Jimbo,Koukou Suu, Hiroshi Sugita, Kenji WatanabeThe Japan Society of Applied Physics(2016)引用 23|浏览7暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要