Effective coating of titania nanoparticles with alumina via atomic layer deposition

Applied Surface Science(2017)

Cited 23|Views7
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Abstract
•Dosing of precursors was optimized based on the breakthrough in the mass spectrum.•Using water resulted in a thicker alumina film on titania than using O3.•Coated TiO2 with alumina showed mitigated photoactivity.•Using D2O enabled determining the origin of the detected TMA.
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Key words
Atomic layer deposition,Growth per cycle,Oxidizer,Photocatalytic activity,Coating of titania
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