Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Cobalt/copper Composite Interconnects for Line Resistance Reduction in Both Fine and Wide Lines

T. Nogami,R. Patlolla,J. Kelly,B. Briggs,H. Huang,J. Demarest, J. Li, R. Hengstebeck,X. Zhang,G. Lian,B. Peethala,P. Bhosale,J. Maniscalco,H. Shobha,S. Nguyen,P. McLaughlin,T. Standaert,D. Canaperi,D. Edelstein,V. Paruchuri

International Interconnect Technology Conference（2017）

Cited 23|Views103
Key words
cobalt,copper,composite or hybrid interconnect,BEOL,line resistance
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined