Antibacterial activity of the thin ZnO film formed by atomic layer deposition under UV-A light
Chemical Engineering Journal（2017）
Abstract
•A thin ZnO film was fabricated on a glass substrate using atomic layer deposition.•The thin ZnO film consisted of vertically-grown closely-packed nano-sized grains.•The thin ZnO film generated ROS under UV-A light like ZnO nanoparticles.•Antibacterial mechanism was due to cellular membrane damage by produced ROS.•The thin ZnO film has practical importance for water disinfection.
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Key words
Antibacterial activity,Atomic layer deposition,Photocatalyst,Reactive oxygen species,Zinc oxide
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