Orthogonally superimposed laser-induced periodic surface structures (LIPSS) upon nanosecond laser pulse irradiation of SiO2/Si layered systems

•The formation of laser-induced periodic surface structures (LIPSS) on Si in dependence on the thickness of SiO2 on top is examined.•By variation of the SiO2 layer thickness different orientations of LIPSS towards the incident laser polarization are observed.•The orientation direction of LIPSS is related to the penetration depth of surface plasmon polariton (SPP) fields into the oxide layer.