Electro-Thermal Annealing Method for Recovery of Cyclic Bending Stress in Flexible a-IGZO TFTs

Myung Keun Lee,Choong-Ki Kim,Jeong Woo Park,Eungtaek Kim,Myeong-Lok Seol,Jun-Young Park,Yang-Kyu Choi,Sang-Hee Ko Park,Kyung Cheol Choi

IEEE Transactions on Electron Devices（2017）

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摘要

Amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) fabricated by low-temperature processes on a flexible substrate can easily be degraded by mechanical deformation. Furthermore, lower performance in terms of the initial characteristics and reliability levels compared to those fabricated on glass substrates with relatively high heat treatments is inevitable. To solve these problems, a local...

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关键词

Stress,Annealing,Substrates,Thin film transistors,Ions,Reliability,Glass

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