Characteristics of IGZO/Ni/IGZO tri-layer films deposited by DC and RF magnetron sputtering

Young-Hwan Song, Tae-Young Eom,Sung-Bo Heo,Joo-Yong Cheon,Byung-Chul Cha,Daeil Kim

Materials Letters（2017）

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摘要

•IGZO and IGZO/Ni/IGZO tri-layer films were deposited on a PC substrate with RF and DC magnetron sputtering.•The influence of the Ni interlayer on the structural, electrical, and optical properties is considered.•IGZO films with a 15-nm thick Ni interlayer showed a lower resistivity of 4.74×10−4Ωcm.

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关键词

In-Ga-doped zinc oxide (IGZO),Ni,Magnetron sputtering,Optical materials and properties,Electrical properties

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