Low-Absorbing and Thermally Stable Industrial Silicon Nitride Films With Very Low Surface Recombination

Amorphous silicon nitride has become the state-of-the-art antireflection coating for silicon solar cells. Optimization of silicon nitride films requires consideration of both the film's optical and electrical properties. It is commonly assumed that silicon-rich silicon nitride films (films with high refractive index) provide better surface passivation, compared to that obtained by films with lower...