Near-Field Microwave Cpw Antenna For Scanning Microscopy

In this work, we present a non-conventional coplanar microwave antenna for near-field applications. This electrical probe is a combination of coplanar line and the point effect. We achieved prototypes of micro-antennas using the clean room techniques. To overcome the oxidation problem, we chose gold as metal structure. We used an oxidized silicon substrate in order to reduce losses in the silicon. Performed measurements and simulations have shown that the antenna is mainly sensitive to the longitudinal electric field. The estimated sensitivity is 30 mu V/(V/m).