Static Analysis of Coupled Micro - beams at both Ends of Electromechanical Coupling

In the micro electro-mechanical system, the electrostatic coupling of the micro-beam at both ends is often used as the driving structure, so it is very important to study the static analysis of the micro-beam structure. The relationship between the geometric structure parameters and the maximum deflection is analyzed by using the Trans coupling unit of Trans126 in ANASYS, and the relationship between the flexural rigidity and the thickness of the micro-beads in the micro electromechanical structure is further revealed.