Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

•A nano-positioning stage for a vertical probe microscope is optimised.•Optimisation was achieved through a combination of modelling and prototype testing.•A 12-fold increase in resonant frequency was achieved (from 500 to 6000Hz).•Out-of-plane distortions were reduced to from 0.3 to less than 0.05μm.•The optimised stage will enable much higher speeds of scanning for the microscope.