Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope
Precision Engineering(2017)
Abstract
•A nano-positioning stage for a vertical probe microscope is optimised.•Optimisation was achieved through a combination of modelling and prototype testing.•A 12-fold increase in resonant frequency was achieved (from 500 to 6000Hz).•Out-of-plane distortions were reduced to from 0.3 to less than 0.05μm.•The optimised stage will enable much higher speeds of scanning for the microscope.
MoreTranslated text
Key words
Design optimisation,Prototype testing,Fea,Atomic force microscope
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined