Conductive DLC Film Prepared by NBECVD for Bio-LSI SensorXijiang ChangThe Japan Society of Applied Physics(2014)引用 23|浏览3暂无评分关键词conductive dlc film prepared,nbecvd,sensor,bio-lsiAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要