Transformation Of Bulk-Type Stacking-Faults Induced By Copper Atoms In Silicon-Crystals

Cu atoms are diffused into Si single crystal samples containing bulk-type stacking faults (SFs), and whole images of the SFs are observed with a transmission electron microscope.In the case of the samples without Cu diffusion, hexagonal SFs with hexagonal Si oxide precipitates are observed. In the case of the samples with Cu diffusion, SFs having branches and CuSi precipitates on edges or inner parts of the branches are observed. CuSi precipitates grow on the Frank dislocation loop, and interstitial Si atoms are released. Such interstitial Si atoms are condensed around the CuSi precipitates, and branches in the <110>-direction grow from the SFs.