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Vacuum UV emission spectroscopy of discharge excited by a RF helical coupling device in N$_{2}$-Ar mixtures

P. Veis,Corinne Foissac,Adriana Annušová,J. Krištof,Viktor Martišovitš,Philippe Supiot

Bulletin of the American Physical Society（2010）

Cited 23|Views3
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Key words
rf helical coupling device,discharge,spectroscopy
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