Graphene Synthesis And Processing On Ge Substrates
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY(2016)
摘要
We review some of the recent results obtained on the graphene synthesis on Ge(100)/Si(100) substrates by molecular beam epitaxy and wafer scale chemical vapor deposition. We outline some of the identified challenges in synthesis and present first experimental results on patterning and in-line metrology of graphene in a 200 mm wafer pilot line.
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