Energy influxes at the substrate in magnetron sputtering processes Pierre-Antoine Cormier,Anne-Lise Thomann,Nadjib Semmar,R 'emi Dussart,Jacky Mathias,Adil Balhamri, Stephanos Konstadinidis,Rony Snyders, Olivier Antonin,Caroline Boisse-Laporte,Tiberiu MineaBulletin of the American Physical Society(2010)引用 23|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要