Mems Tunable Hybrid Plasmonic-Si Waveguide

2017 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)（2017）

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摘要

A MEMS tunable hybrid plasmonic-Si (HP) waveguide is investigated, showing very large changes of both effective refractive index and propagation loss when applying bias voltage. Preliminary experimental results show that: with 15 mu m MEMS structure in Si waveguide platform, the extinction ratio can be over 200dB between "on" and "off' states.

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关键词

MEMS tunable hybrid plasmonic-Si waveguide,effective refractive index,propagation loss,bias voltage,MEMS structure,extinction ratio,on states,off states,size 15 mum,Si

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