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Research On Micro-Fabricated Gas Chromatographic Columns With Embedded Ellipitic Cylindrical Posts

Bowen Tian,Fei Feng,Lei Hou,Fan Luo,Xinxin Li,Xiaohong Ge,Yanhong Wu

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)（2017）

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Abstract
This paper reports a newly developed micro-fabricated gas chromatographic (mu GC) column with embedded elliptic cylindrical posts (ECP) in a silicon-glass architecture, which has higher surface area and less quasi-zero velocity zone compared to the state of the art. By coating polydimethylsiloxane as the stationary phase, the 2 m and 4 m columns can separate methane and ethane with 0.66 and 1.02 resolution.
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Key words
microfabricated gas chromatographic column,embedded ellipitic cylindrical post,silicon-glass architecture,quasizero velocity zone,surface area,Bowen polydimethylsiloxane coating,stationary phase,methane,ethane
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