On-Chip Terahertz Electronics: From Device-Electromagnetic Integration To Energy-Efficient, Large-Scale Microsystems

Ruonan Han,J. W. Holloway,Chen Jiang,Ali Mostajeran,Ehsan Afshari,Andreia Cathelin,Yaming Zhang,L. Boglione,T. M. Hancock,Cheng Wang,Zhi Hu,Guo Zhang

2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)（2016）

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摘要

This paper summarizes our approaches which synthesize the optimum electromagnetic (EM)-wave environment around various silicon devices, in order to maximize the device efficiency with minimum passive loss and footprint. This has enabled multi-mW THz radiation in standard silicon processes. Various critical capabilities for future THz microsystems, including integrated phase locking, multi-pixel coherent imaging, and an ultra-broadband inter-chip waveguide link, are also demonstrated.

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关键词

on-chip terahertz electronics,device-electromagnetic integration,energy-efficient large-scale microsystems,optimum EM-wave environment,optimum electromagnetic-wave environment,silicon devices,device efficiency maximization,passive loss,multimW THz radiation,standard silicon processes,integrated phase locking,multipixel coherent imaging,ultra-broadband inter-chip waveguide link

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