Characterizations of Thin Tungsten Films Deposited on Polyimide, Si(111) and SiO₂ by Direct-Current Magnetron Sputtering

Rui Zhang, Yujia Liu, Yan Wang, Zhenxuan Huo,Bo Du,Hui Zhong,Yu Shi

Journal of Computational and Theoretical Nanoscience（2016）

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thin tungsten films,sio2,direct-current

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Characterizations of Thin Tungsten Films Deposited on Polyimide, Si(111) and SiO2 by Direct-Current Magnetron Sputtering