Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applications

Lightwave transmission is a promising candidate for data interconnections, including the short-distance data communication. The method by which photonics and electronics ought to be integrated is developing and not well resolved yet. In particular, the different requirements of buried oxide thickness for photonics and electronics hamper their integration on the same chip. In this paper, we present...