Analysis of Thin Phase-Shifter Films using Surface Analysis Techniques

Journal Article Analysis of Thin Phase-Shifter Films using Surface Analysis Techniques Get access Vincent S Smentkowski, Vincent S Smentkowski General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309 Search for other works by this author on: Oxford Academic Google Scholar Laurie LeTarte, Laurie LeTarte General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309 Search for other works by this author on: Oxford Academic Google Scholar Hong Piao, Hong Piao General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309 Search for other works by this author on: Oxford Academic Google Scholar Michael Marko Michael Marko Wadsworth Center, Empire State Plaza, P.O. Box 509, Albany NY 12201-0509 Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 394–395, https://doi.org/10.1017/S1431927616002828 Published: 25 July 2016