Automatic FIB-SEM Preparation of Straight Pillars for Micro-Compression Testing

Journal Article Automatic FIB-SEM Preparation of Straight Pillars for Micro-Compression Testing Get access Tobias Volkenandt, Tobias Volkenandt Carl Zeiss Microscopy GmbH, Oberkochen, Germany Search for other works by this author on: Oxford Academic Google Scholar Alexandre Laquerre, Alexandre Laquerre Fibics Incorporated, Ottawa, Canada Search for other works by this author on: Oxford Academic Google Scholar Michal Postolski, Michal Postolski Carl Zeiss Microscopy GmbH, Oberkochen, Germany Search for other works by this author on: Oxford Academic Google Scholar Fabian Perez-Willard Fabian Perez-Willard Carl Zeiss Microscopy GmbH, Oberkochen, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 190–191, https://doi.org/10.1017/S143192761600180X Published: 25 July 2016