Electrostatic actuation of folded multi-graphene structure for nano-gripper

Takafumi Fujiwara,Masahiro Nakajima,Akihiko Ichikawa,Kenichi Ohara,Yasuhisa Hasegawa,Toshio Fukuda

2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)（2016）

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摘要

This paper presents a electrostatic actuation of multi-graphene which was folded by nanomanipulation for novel nano-gripper application. The development design of multi-graphene was initially fabricated by focused ion beam (FIB) process. The nanomanipulation system was used for folding and electrostatic actuation inside a FESEM (Field Emission Scanning Electron Microscope). The movement of multi-graphene was confirmed by electrostatic forces. The actuation was evaluated depending on the applied voltages.

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关键词

electrostatic actuation,folded multigraphene structure,nanomanipulation,nanogripper application,focused ion beam process,FIB process,FESEM,field emission scanning electron microscope,electrostatic forces

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