A New Electron Bridge Channel 1T-DRAM Employing Underlap Region Charge Storage

We experimentally demonstrate a new type of silicon-based capacitorless one-transistor dynamic random access memory (1T-DRAM) with an electron-bridge channel. The fabrication steps are fully compatible with modern CMOS technology. An underlap device structure is exploited and positive charges are primarily stored in drain-side and source-side p-type pseudo-neutral regions under the oxide spacer. T...