Influence of crystallinity of as-deposited Ge film on formation of quantum dot in carbon-mediated solid-phase epitaxy

The influence of crystallinity of as-deposited Ge films on Ge quantum dot (QD) formation via carbon (C)-mediated solid-phase epitaxy (SPE) was investigated. The samples were fabricated by solid-source molecular beam epitaxy (MBE). Ge/C/Si structure was formed by sequential deposition of C and Ge at deposition temperature (TD) of 150–400°C, and it was heat-treated in the MBE chamber at 650°C. In the case of amorphous or a mixture of amorphous and nano-crystalline Ge film grown for TD ≤250°C, density of QDs increased with increasing TD due to the increase of C-Ge bonds in Ge layer. Ge QDs with diameter of 9.2±2.1nm were formed in the highest density of 8.3×1011cm−2 for TD =250°C. On the contrary, in the case of polycrystalline Ge film for TD ≥300°C, density of QDs decreased slightly. This is because C incorporation into Ge layer during SPE was suppressed due to the as-crystallized columnar grains. These results suggest that as-deposited Ge film in a mixture of amorphous and nano-crystalline state is suitable to form small and dense Ge QDs via C-mediated SPE.