Piezoelectric Characteristic Analysis Of Diaphragm Type Pzt Oscillator
2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)(2016)
摘要
We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth using an FEM simulator. The remarkable finding is that the receiving frequency bandwidth of the proposed model is much wider than a typical one. In addition, we confirmed a superiority and a future task in consideration of producing a piezoelectric micromachined ultrasonic transducer (pMUT) array.
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关键词
piezoelectric characteristic analysis,diaphragm type PZT oscillator,models transmission efficiency,sensitivity,piezoelectric voltage,electric charge,frequency bandwidth,FEM simulator,piezoelectric micromachined ultrasonic transducer array,PZT-Si
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