Free-Space Permittivity Measurement at Terahertz Frequencies With a Vector Network Analyzer
IEEE Transactions on Terahertz Science and Technology(2016)
摘要
A simple system, based on a vector network analyzer, has been used with new numerical de-embedding and parameter inversion techniques to determine the relative permittivity (dielectric properties) of materials within the frequency range 750-1100 GHz. Free-space (noncontact), nondestructive testing has been performed on various planar dielectric and semiconducting samples. This system topology is w...
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关键词
Frequency measurement,Permittivity measurement,Semiconductor device measurement,Permittivity,Scattering parameters,Dielectrics
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