基于相位恢复的光学元件面形检测技术研究

Journal of Applied Optics(2015)

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Abstract
利用标量衍射的角谱理论,研究了基于两幅光强分布的相位恢复算法,并将此算法应用到光波的波前及光学元件面形的检测中。实验研究了球面光波波前的相位恢复及面形检测,给出了恢复波前与理想波前之间的偏差,采用求Zernike系数的广义逆矩阵的方法,用程序实现了光学元件面形的Zernike拟合。
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Key words
angular spectrum theory,phase recovery,surfaces,Zernike fitting
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