Spectroscopic imaging ellipsometry of self-assembled SiGe/Si nanostructures

M. I. Alonso,S. Funke,A. González,M. Garriga,P.O. Vaccaro,Alejandro R. Goñi,A. Ruiz,María Teresa Alberdi Alonso,P.H. Thiesen

Applied Surface Science（2017）

Cited 2|Views22

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Abstract

•Imaging ellipsometry allows to investigate the optical response of SiGe/Si nanowires.•Spectroscopic measurements enable study of both structural and optical properties.•Inhomogeneous Ge content of different film regions is identified.•Measured anisotropic response of nanowires is ascribed to waveguide-like resonances.

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Key words

Spectroscopic imaging ellipsometry,In-plane nanowires,Dielectric function,Silicon–germanium alloys,Anisotropic absorption

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